Planar technode layer stack grouped by process role.
| L/D | Purpose | Material | Color | Name | thickness (um) | zmin (um) | Public |
|---|---|---|---|---|---|---|---|
| 2001/0 | vacuum | Vacuum | Vacuum | 1050.2 | -525.0 | Y |
| L/D | Purpose | Material | Color | Name | thickness (um) | zmin (um) | Public |
|---|---|---|---|---|---|---|---|
| 1201/0 | substrate | Si_cryo | QSubstrate | 525.0 | -525.0 | Y |
| L/D | Purpose | Material | Color | Name | thickness (um) | zmin (um) | Public |
|---|---|---|---|---|---|---|---|
| 9/0 | metal | Al | QM1F_cheesing | 0.2 | 0.0 | Y | |
| 2/0 | ground | Al | QM1F_cpwgnd | 0.2 | 0.0 | Y | |
| 1/0 | signal | Al | QM1F_cpwsig | 0.2 | 0.0 | Y | |
| 4/0 | ground | Al | QM1F_flxgnd | 0.2 | 0.0 | Y | |
| 3/0 | signal | Al | QM1F_flxsig | 0.2 | 0.0 | Y | |
| 8/0 | ground | Al | QM1F_gengnd | 0.2 | 0.0 | Y | |
| 7/0 | signal | Al | QM1F_gensig | 0.2 | 0.0 | Y | |
| 6/0 | ground | Al | QM1F_qbtgnd | 0.2 | 0.0 | Y | |
| 5/0 | signal | Al | QM1F_qbtsig | 0.2 | 0.0 | Y |
| L/D | Purpose | Material | Color | Name | thickness (um) | zmin (um) | Public |
|---|---|---|---|---|---|---|---|
| 22/0 | bridge | Al | QRB_gnd | 3.0 | 0.2 | Y | |
| 32/0 | bridge | Al | QRT_gnd | 0.3 | 3.2 | Y |